真空摩擦試驗(yàn)機(jī)的設(shè)計含11張CAD圖
真空摩擦試驗(yàn)機(jī)的設(shè)計含11張CAD圖,真空,摩擦,磨擦,試驗(yàn),實(shí)驗(yàn),設(shè)計,11,十一,cad
外文翻譯
A multifunctional vacuum friction and wear tester is mainly composed of a vacuum system, a friction wear system, a power transmission system, and a control system.
??The vacuum system comprises: a vacuum chamber (1), at least one observation window (4) arranged on the side wall of the vacuum chamber (1), a vacuum pump interface flange (11) for connecting a vacuum pump, and the arrangement on the top cover Configure multiple flanges of the feature;
??The friction wear system includes a lever structure (22) for fixing the upper specimen fixture (20) and being freely rotatable in both horizontal and vertical directions, and a specimen for fixing the lower specimen disk (6). The platform (7), wherein the upper sample friction ball or friction pin (5) is fixed on the upper sample holder (20), and the temperature sensor (2) and pressure provided on the upper sample holder (20). Sensor (3);
??The power transmission system comprises: a servo motor (9), the servo motor (9) driving the sample platform (7) and the lower sample disk (6) through the magnetic fluid coupling (10) and the rotary shaft (8);
??The control system consists of a composite vacuum gauge for measuring the degree of vacuum in the vacuum chamber (1), and for controlling the molecular pump, mechanical pump, high vacuum electromagnetic flapper valve, friction sample platform (7) rotation and lever structure ( 22) Control system for functional components such as electric lifts.
??2. The vacuum friction and wear tester according to claim 1, wherein the specimen holder has a hollow portion, and the temperature sensor inserts a sample friction ball through the hollow portion or The pin (5) is rubbed to approximate the friction interface.
??3. The multifunctional vacuum friction and wear testing machine of claim 2, wherein the lever structure (22) comprises a cantilevered beam (18) and a vertical arm (23) disposed vertically, the cantilevered beam (18). The vertical arm (23) is connected by a two-degree-of-freedom bearing structure (17), and the sample fixture (20) is disposed at one end of the cantilever (18) at the cantilevered jaw (18) and the bearing structure (17). Two-thirds are provided with a weight plate (19), and a counterweight (16) is provided at the other end of the cantilever beam (18).
??The multifunctional vacuum friction and wear tester according to claim 3, further comprising a robot hand (15) and a hand wheel mechanism (13), the cantilever beam (18) being controllable by a robot (15) In both horizontal and vertical rotation, the vertical arm (23) is placed on a high-accuracy displacement platform (12), which can be controlled horizontally by the hand wheel mechanism (13). The precise movement to adjust the position of the friction contact point, through the precise control of the manipulator (15) and the handwheel mechanism (13), can control the position of the cantilever beam (18) and accurately adjust the position of the upper: lower sample contact point.
??5. The multifunctional vacuum friction and wear tester according to claim 4, wherein the robot hand (15) and the hand wheel mechanism (13) are respectively installed in the vacuum chamber through a dynamic sealing device (14). ) on the shell.
??The multifunctional vacuum friction and wear tester according to any one of claims 1 to 5, wherein the vacuum friction and wear tester further comprises a data acquisition processing system and a motion control system, wherein the data acquisition and processing system comprises: : The data acquisition card (25) for receiving the signals of the temperature sensor (2) and the pressure sensor (3), the data acquisition card (25) transmits the collected signal to the computer (26), and is supported by a matching software system. The collected data is analyzed, processed, displayed in real time, generated curves and experimental reports. The motion control system includes a software system, a microcontroller and a servo system.
??The vacuum friction and wear tester according to claim 6, wherein the vacuum friction abrasion tester comprises high-speed direct mechanical pumps connected to the vacuum chambers (1) through vacuum pump interface flanges (11), respectively. With a turbomolecular pump, a vacuum of 6X 10"Pa can be achieved in the vacuum chamber (1) by successively starting the high-speed direct-coupled mechanical pump and the turbo molecular pump.
??8. The multifunctional vacuum friction and wear tester according to claim 7, wherein the magnetic fluid coupling (10) of the power transmission system is reliable by docking the coupling flange and the vacuum chamber (1). The dynamic seal, its leakage rate is less than 1X10~'Pa.m.s'.
[0001] The present invention pertains to the field of material and device performance testing, and specifically relates to a multifunctional vacuum friction wear tester capable of simulating the effects of space environment factors (such as a high vacuum environment) and performing friction material and device performance tests.
??Background technique
??[0002] With the development of aerospace and other high technologies, many equipment such as spacecrafts are operated in a high-vacuum environment (10 "Pa ~ 10'Pa" level), and the vacuum environment conditions will bring about special tribological problems. For example, in the absence of oxygen and other atmospheric reactants in the vacuum, the oxide film on the metal surface is quickly removed during the rubbing process, and it is difficult to form a new oxide film. Therefore, the rubbing surface is quickly exposed to the “exposed” state and the fresh metal surface. Severe adhesion occurs in direct contact with each other; there is no diffusion convection of the gas to remove the frictional heat in time, the temperature of the friction surface will rapidly increase, thereby changing the physical properties and chemical stability of the friction material; the liquid lubricant molecules will be in a vacuum. It evaporates at a very high rate, causing rapid loss of lubricant and rendering it ineffective.
??[0003] To solve the problem of lubrication in a vacuum environment and develop various new types of lubricating materials, a large number of tribological experiments must be conducted. Compared with the friction and wear test under the actual working conditions of equipment parts, the laboratory simulation test environment and working conditions are relatively easy to control, the test conditions vary widely, the test cost is relatively low, and the comparative system can be obtained in a short time. data. Therefore, in the research of tribology, the laboratory simulation test has been widely used, and the development of the corresponding test and test equipment and technology is very important.
?[0004] The vacuum friction and wear tester is a basic tool for tribological design and lubrication material selection in a vacuum environment. Because the vacuum friction and wear tester involves key technologies such as vacuum acquisition, dynamic sealing, and real-time signal acquisition, the styling products used for the study of the friction and wear characteristics of materials in a vacuum environment at home and abroad are still scarce.
??[0005] With the increasing attention paid to the problem of vacuum tribology, researchers at home and abroad have carried out the development of a vacuum friction tester.
??[0006] Beijing Institute of Mechanical Industry and Tsinghua University, Cui Zhouping, Liu Jiaxuan and others have developed MT-1 vacuum friction and wear testing machine, the machine can be in a variety of conditions such as vacuum, gas, heating and cooling, friction and wear of materials The mechanism study can provide a pressure environment from the atmosphere to 6.7 X 10 "Pa. Its measurable load and velocity and temperature and vibration characteristics have a wide adjustable range, and the introduction of a computer-aided data acquisition and processing system, measurement parameters Many, repeatability and experimental accuracy are better.Song Baoyu and others of Harbin Institute of Technology also developed the SY-1 vacuum friction and wear tester, which is mainly composed of a friction tester, a vacuum system, and test parameters in a vacuum chamber. It is composed of four parts: the instrument system and the data acquisition and processing system. It can provide a pressure environment of 4 X 10 "Pa, and the speed can be adjusted within the range of 0-2800r/min. It can perform various conditions such as vacuum, charging different gases, heating and cooling. Under the material tribological performance test. The main problem with these devices is that the degree of vacuum that can be provided is too low to realistically simulate the aerospace high vacuum environment in which the spacecraft and others are working. In addition, although the equipment is equipped with a data acquisition system and corresponding software, it was limited by the technical level at the time. The operation and maintenance of the equipment is relatively complicated and the stability needs to be improved.
??[0007] Swiss CSM company produced HVT, VTR two types of vacuum friction and wear testing machine and can provide a 10-Pa high vacuum environment, and pumping high vacuum to 10-5 Pa less than 2 hours, the primary vacuum only It takes 10 minutes. The friction and wear rate during the test can be accurately measured and calculated by the sensor and supporting software. Equipment accuracy and safety
?High, easy to operate. However, the current market price of such equipment is high, the minimum configuration is also more than 200,000 US dollars, and procurement and after-sales service are not very convenient.
??Summary of the Invention
??[0008] The present invention optimizes and integrates an ultra-high vacuum system and a multi-functional friction wear tester, and successfully develops a multi-functional vacuum friction wear tester having an ultimate vacuum of 6×10 Pa. After subsequent expansion, the tester can perform friction and wear tests under vacuum, radiation, corrosion and other special environmental atmospheres, in order to provide more basic equipment for the study of tribology of special conditions.
??[0009] The present invention relates to a multifunctional vacuum friction wear tester, which is mainly composed of a vacuum system, a friction wear system, a power transmission system, and a control system. The vacuum system comprises: a vacuum chamber (1), at least one observation window (4) arranged on the side wall of the vacuum chamber (1), a vacuum pump interface flange (11) for connecting a vacuum pump, and the arrangement on the top cover A plurality of flanges for configuring a functional part; the friction and wear system includes a lever structure (22) for fixing the upper specimen fixture (20) and freely rotatable in both horizontal and vertical directions. Fix the sample platform (7) of the lower sample plate (6), wherein the upper sample friction ball or friction pin (5) is fixed on the upper sample clamp (20) and the upper sample clamp (20) The temperature sensor (2) and the pressure sensor (3) on the ); the power transmission system includes: the servo motor (9), the servo motor (9) drives the test through the magnetic fluid coupling (10) and the rotary shaft (8) The sample platform (7) and the lower sample plate (6) rotate; the control system includes: a composite vacuum gauge for measuring the degree of vacuum in the vacuum chamber (1), and a molecular vacuum pump, a mechanical pump, and a high vacuum electromagnetic shield. The control system for functional components such as plate valves, frictional specimen platform (7) rotation and lever lift (22) electric lifts. [0010] The specimen holder (20) has - a hollow portion through which the temperature sensor (2) is inserted with a sample pin or ball (5) to approach the friction interface. [0011] The lever structure (22) includes a cantilever beam (18) and a vertical arm (23) arranged vertically, and the cantilever beam (18) and the vertical arm (23) are connected through a two-degree-of-freedom bearing structure (17) The upper specimen holder (20) is disposed at one end of the cantilever beam (18), and a weight disc (19) is disposed at two-thirds of the center of the cantilever raft (18) and the bearing structure (17). The other end of (18) is provided with a counterweight (16).
??[0012] The multi-functional vacuum friction wear testing machine further includes a robot (15) and a hand wheel mechanism (13), the cantilever (18) can be controlled by the robot (15) for horizontal and vertical rotation, The vertical arm (23) is placed on a high-accuracy displacement platform (12), which can be controlled by a hand wheel mechanism (13) to perform precise horizontal movement through the manipulator (15) and The precise control of the handwheel mechanism (13) can control the position of the cantilever beam (18) and precisely adjust the position of the friction and wear contact point, so that one sample can be performed without deflation and re-vacuum. Several tests with different friction radii are performed, which greatly reduces the test time and cost;
??The robot hand (15) and the hand wheel mechanism (13) are respectively mounted on the housing of the vacuum chamber (1) through the dynamic sealing device (14).
??[0014] The multi-functional vacuum friction wear testing machine further includes a data acquisition processing system, the data acquisition processing system includes: a data acquisition card for receiving the signals of the temperature sensor (2) and the pressure sensor (3) (25) The data acquisition card (25) transmits the collected signal to the computer (26) and analyzes and processes the collected data by the supporting software system, real-time display, curve generation and experiment report. The motion control system includes a software system, a single-chip microcomputer and a servo system, and a motion control system is used to adjust the motion parameters such as the sliding speed and the direction during the friction test.
??[0015] The multi-functional vacuum friction wear testing machine includes a high-speed direct-coupled mechanical pump and a turbomolecular pump which are respectively connected to a vacuum chamber (1) through a vacuum pump interface flange (11), and successively start the high-speed direct mechanical device. Pumps and turbines
The pump can achieve a vacuum of 6×10"Pa inside the vacuum chamber (1). The power transmission system's magnetic fluid coupling (10) is connected via the coupling flange and the vacuum chamber (1) to achieve a reliable dynamic seal. The leak rate is less than 1X10~'Pa.ms." [0016] The basic functions of the testing machine of the present invention are spatial high vacuum environment simulation and tribological performance testing. The multifunctional tribological performance test module is integrated and assembled in the environment simulation system, wherein the tribological test module can be tested in a variety of contact manners within a wide range of operating speeds and load ranges; and the solids can be separately determined through a reasonable tooling design. Lubricant materials (standard test pieces) and friction components (bearings, gears, and other typical parts) perform environmental damage studies and tribological performance tests.
[0017] Compared with similar testing machines, this testing machine has the following remarkable features:
[0018] First, the vacuum chamber size design and vacuum unit configuration is reasonable, can provide the ultimate vacuum degree of 6X10*Pa, and the vacuum pumping time is short and the test period is short;
[0019] Secondly, the position of the contact point of the friction pair can be precisely adjusted outside the vacuum chamber, so that multiple tests of different friction radii can be performed on one sample without deflation and re-evacuation. Test time and cost are greatly reduced;
[0020] Third, the device can simulate the operating conditions of various typical friction parts in a variety of relative motions over a wide range of speeds and loads. At the beginning of the design of the equipment, expansion and versatility are taken into consideration. After a reasonable tooling and test method design, a variety of space tribology and environmental simulation tests can be performed.
[0021] Fourth, the tester is easy to operate and maintain, the test data is accurate and reliable, and the overall cost is low.
原 文
一種多功能真空摩擦磨損試驗(yàn)機(jī),其主要由真空系統(tǒng)、摩擦磨損系統(tǒng)、動力傳動系統(tǒng)、控制系統(tǒng)構(gòu)成，
其中真空系統(tǒng)包括:真空室(1),在真空室(1)的側(cè)壁布置的至少一個觀察窗(4),用于連接真空泵的真空泵接口法蘭(11),以及在頂蓋上布置的配置功能部件的多個法蘭;
摩擦磨損系統(tǒng)包括:用于固定上試樣件卡具(20) 的并可在水平和豎直兩個方向自由旋轉(zhuǎn)的杠桿結(jié)構(gòu)(22),用 于固定下試樣盤(6)的試樣平臺(7),其中上試樣摩擦球或摩擦銷(5)固定在上試樣卡具(20)上,以及設(shè)置在上試樣卡具(20).上的溫度傳感器(2)和壓力傳感器(3) ;
動力傳動系統(tǒng)包括:伺服電機(jī)(9) ,伺服電機(jī)(9)通過磁流體聯(lián)軸器(10) 和旋轉(zhuǎn)軸(8)帶動所述試樣平臺(7) 和下試樣盤(6)轉(zhuǎn)動;
控制系統(tǒng)包括:用于測量真空室(1)內(nèi)的真空度的復(fù)合真空計,以及用于控制分子泵、機(jī)械泵、高真空電磁擋板閥、摩擦試樣平臺(7)旋轉(zhuǎn)和杠桿結(jié)構(gòu)(22) 的電動升降機(jī)等功能性部件的控制系統(tǒng)。
2. 如權(quán)利要求1所述的真空摩擦磨損試驗(yàn)機(jī),其特征在于,所述試樣卡具(20)具有一中空部，所述溫度傳感器(2)通過中空部插入上試樣摩擦球或摩擦銷(5)以接近摩擦界面。
3.如權(quán)利要求2所述的多功能真空摩擦磨損試驗(yàn)機(jī)，其特征在于,所述杠桿結(jié)構(gòu)(22)包括呈垂直設(shè)置的懸臂梁(18)和豎直臂(23),懸臂梁(18)和豎直臂(23)通過兩自由度軸承結(jié)構(gòu)(17)連接,試樣卡具(20)設(shè)置在懸臂梁(18)的一~端部，在懸臂粱(18)與軸承結(jié)構(gòu)(17)之間三分之二處設(shè)置有砝碼盤(19),在懸臂梁(18)的另-端設(shè)置有配重(16)。
1. 如權(quán)利要求3所述的多功能真空摩擦磨損試驗(yàn)機(jī)，其特征在于,還包括機(jī)械手(15)和手輪機(jī)構(gòu)(13),所述懸臂梁(18)可通過機(jī)械手(15)控制進(jìn)行水平和豎直兩個方向的轉(zhuǎn)動,所述豎直臂(23)放置于高精度位移平臺(12) 上,所述高精度位移平臺(12)可通過手輪機(jī)構(gòu)(13)控制進(jìn)行水平方向的精確移動，以調(diào)節(jié)摩擦接觸點(diǎn)的位置,通過機(jī)械手(15)和手輪機(jī)構(gòu)(13)的精確控制，可以控制懸臂梁(18)的位置并精確調(diào)節(jié)上: 下試樣接觸點(diǎn)的位置。
5.如權(quán)利要求4所述的多功能真空摩擦磨損試驗(yàn)機(jī)，其特征在于,所述機(jī)械手(15) 和手輪機(jī)構(gòu)(13)分別通過動密封裝置(14)貫通地安裝于真空室(1)的外殼上。
6.如權(quán)利要求1至5之一所述的多功能真空摩擦磨損試驗(yàn)機(jī),其特征在于,所述真空摩擦磨損試驗(yàn)機(jī)還包括數(shù)據(jù)采集處理系統(tǒng)和運(yùn)動控制系統(tǒng)，所述數(shù)據(jù)采集處理系統(tǒng)包括:用于接收溫度傳感器(2)和壓力傳感器(3)的信號的數(shù)據(jù)采集卡(25),數(shù)據(jù)采集卡(25)將采集到的信號傳送到計算機(jī)(26)，并由配套的軟件系統(tǒng)對所采集到的數(shù)據(jù)進(jìn)行分析處理、實(shí)時顯示、生成曲線和實(shí)驗(yàn)報表，所述運(yùn)動控制系統(tǒng)包括軟件系統(tǒng)、單片機(jī)和伺服系統(tǒng)。
7.如權(quán)利要求6所述的真空摩擦磨損試驗(yàn)機(jī)，其特征在于,所述真空摩擦摩損試驗(yàn)機(jī)包括分別通過真空泵接口法蘭(11)與真空室(1)連接的高速直聯(lián)機(jī)械泵和渦輪分子泵,通過先后啟動所述高速直聯(lián)機(jī)械泵和渦輪分子泵,可使真空室(1)內(nèi)達(dá)到6X 10"Pa的真空
8.如權(quán)利要求7所述的多功能真空摩擦磨損試驗(yàn)機(jī),其特征在于,所述動力傳動系統(tǒng)的磁流體聯(lián)軸器(10)通過聯(lián)軸器法蘭和真空室(1)對接實(shí)現(xiàn)可靠的動密封，其泄漏率小于1X10~'Pa.m.s'。
[0001] 本發(fā)明屬于材料和器件性能測試領(lǐng)域，具體涉及-種能模擬空間環(huán)境因素作用(例如高真空環(huán)境)并進(jìn)行摩擦材料和器件性能測試的多功能真空摩擦磨損試驗(yàn)機(jī)。
背景技術(shù)
[0002] 隨著航空航天等高技術(shù)的發(fā)展，航天器等許多裝備都運(yùn)行于高真空環(huán)境下(10 "Pa~ 10 'Pa量級),真空環(huán)境工況會帶來特殊的摩擦學(xué)問題。例如，真空中缺乏氧和其它大氣反應(yīng)物，金屬表面的氧化膜在摩擦過程中很快地被去除，而且難以形成新的氧化膜，因此，摩擦表面很快處于“裸露”狀態(tài)，新鮮金屬表面間直接接觸而發(fā)生嚴(yán)重的粘著;沒有氣體的擴(kuò)散對流來及時帶走摩擦熱量，摩擦表面的溫度將迅速升高，從而改變摩擦材料的物理性能和化學(xué)穩(wěn)定性;液體潤滑劑分子在真空中會以很大的速度揮發(fā),造成潤滑劑的迅速流失而使?jié)櫥А?
[0003] 要解決真空環(huán)境中的潤滑難題，開發(fā)各種新型潤滑材料,必須進(jìn)行大量的摩擦學(xué)實(shí)驗(yàn)。相比于裝備零件實(shí)際工況下的摩擦磨損實(shí)驗(yàn)而言，實(shí)驗(yàn)室模擬試驗(yàn)的環(huán)境和工況因素相對容易控制，試驗(yàn)條件變化范圍寬，試驗(yàn)成本比較低，可在短時間內(nèi)獲得比較系統(tǒng)的數(shù)據(jù)。因此，在摩擦學(xué)研究中，實(shí)驗(yàn)室模擬試驗(yàn)得到了廣泛的應(yīng)用,相應(yīng)的試驗(yàn)測試設(shè)備和技術(shù)的開發(fā)顯得非常重要。
[0004] 真空摩擦磨損試驗(yàn)機(jī)是進(jìn)行真空環(huán)境工況中摩擦學(xué)設(shè)計及潤滑材料選擇的基本工具。由于真空摩擦磨損試驗(yàn)機(jī)涉及到真空獲得、動密封、實(shí)時信號采集等難度較大的關(guān)鍵技術(shù)，目前國內(nèi)外用于真空環(huán)境下材料的摩擦磨損特性研究的定型產(chǎn)品還非常匱乏。
[0005] 隨著真空摩擦學(xué)問題越來越受到重視，國內(nèi)外相關(guān)單位的研究人員都曾開展過真空摩擦試驗(yàn)機(jī)的研制。
[0006] 北京機(jī)械工業(yè)管理學(xué)院和清華大學(xué)的崔周平、劉家浚等曾研制了MT-1型真空摩擦磨損試驗(yàn)機(jī)，該機(jī)可在真空、充氣、加熱及冷卻等多種條件下進(jìn)行材料摩擦磨損機(jī)理的研究，可以提供從大氣到6.7X 10 "Pa的壓力環(huán)境,其可測載荷和速度及溫度和振動特性都有較寬的可調(diào)范圍,并引入了計算機(jī)輔助數(shù)據(jù)采集處理系統(tǒng),測量參數(shù)多,重復(fù)性和實(shí)驗(yàn)精度較好。哈爾濱工業(yè)大學(xué)的宋寶玉等人也研制了SY-1型真空摩擦磨損試驗(yàn)機(jī),該機(jī)主要由置于真空室內(nèi)的摩擦試驗(yàn)機(jī)、真空系統(tǒng)、試驗(yàn)參數(shù)測量與儀表系統(tǒng)、數(shù)據(jù)采集處理系統(tǒng)四個部分構(gòu)成，可以提供4X 10 "Pa的壓力環(huán)境,速度在0-2800r/min范圍內(nèi)可調(diào)，可以進(jìn)行真空、充不同氣體、加熱及冷卻等多種條件下的材料摩擦學(xué)性能測試。這些設(shè)備的主要問題是所能提供的真空度太低，不能真實(shí)模擬航天器等所工作的宇航高真空環(huán)境,此外，設(shè)備雖配備了數(shù)據(jù)采集系統(tǒng)和相應(yīng)的軟件，但因當(dāng)時技術(shù)水平所限，設(shè)備的操作維護(hù)相對復(fù)雜，穩(wěn)定性也有待提高。
[0007] 瑞士CSM公司生產(chǎn)了HVT、VTR兩個型號的真空摩擦磨損試驗(yàn)機(jī)并可提供10-帕的高真空環(huán)境，而且抽高真空到10-5帕只需不到2小時，初級真空只需10分鐘。測試過程中摩擦力和磨損率可通過傳感器及配套軟件自動精確測量和計算。設(shè)備的精度和安全性較
高,操作也較方便。但該類設(shè)備目前的市場價格較高,最低配置也在20萬美元以上，且采購和售后服務(wù)等都不太方便。
發(fā)明內(nèi)容
[0008] 本發(fā)明將超高真空系統(tǒng)和多功能摩擦磨損試驗(yàn)機(jī)進(jìn)行優(yōu)化集成，成功研制出極限真空度達(dá)到6X 10Pa的多功能真空摩擦磨損試驗(yàn)機(jī)。該試驗(yàn)機(jī)經(jīng)后續(xù)擴(kuò)充后即可進(jìn)行真空、輻射、腐蝕等多種特殊環(huán)境氣氛下的摩擦磨損試驗(yàn)，以期為模擬特殊工況的摩擦學(xué)研究提供更多的基礎(chǔ)設(shè)備。
[0009] 本發(fā)明涉及一~種多功能真空摩擦磨損試驗(yàn)機(jī)，其主要由真空系統(tǒng)、摩擦磨損系統(tǒng)、動力傳動系統(tǒng)、控制系統(tǒng)構(gòu)成。其中真空系統(tǒng)包括:真空室(1),在真空室(1)的側(cè)壁布置的至少一個觀察窗(4),用于連接真空泵的真空泵接口法蘭(11),以及在頂蓋上布置的用于配置功能部件的多個法蘭;摩擦磨損系統(tǒng)包括:用于固定上試樣件卡具(20)的并可在水平和豎直兩個方向自由旋轉(zhuǎn)的杠桿結(jié)構(gòu)(22),用于固定下試樣盤(6)的試樣平臺(7),其中上試樣摩擦球或摩擦銷(5) 固定在上試樣卡具(20)上,以及設(shè)置在上試樣卡具(20)上的溫度傳感器(2)和壓力傳感器(3) ;動力傳動系統(tǒng)包括:伺服電機(jī)(9)，伺服電機(jī)(9)通過磁流體聯(lián)軸器(10) 和旋轉(zhuǎn)軸(8) 帶動所述試樣平臺(7)和下試樣盤(6)轉(zhuǎn)動;控制系統(tǒng)包括:用于測量真空室(1)內(nèi)的真空度的復(fù)合真空計,以及用于控制分子泵、機(jī)械泵、高真空電磁擋板閥、摩擦試樣平臺(7)旋轉(zhuǎn)和杠桿結(jié)構(gòu)(22)的電動升降機(jī)等功能性部件的控制系統(tǒng)。[0010] 所述試樣卡具(20)具有- -中空部，所述溫度傳感器(2)通過中空部插入上試樣銷或球(5)以
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